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Automatic cleaning machine×PHT - List of Manufacturers, Suppliers, Companies and Products

Automatic cleaning machine Product List

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Silicon wafer batch-type automatic cleaning device

Providing suitable custom equipment tailored to your needs! Design capable of process optimization.

This product is a batch-type automatic cleaning device for silicon wafers that achieves an optimal process with a simple processing structure. The arrangement of parts takes maintenance into consideration. Each unit of the cleaning device is modularized. It supports various processes such as "post-wire saw cleaning," "post-lapping cleaning," and "alkaline etching cleaning." 【Features】 ■ High process performance ■ High throughput ■ Improved maintainability ■ Equipment design ■ Extensive track record *For more details, please refer to the PDF materials or feel free to contact us.

  • Company:PHT
  • Price:Other
  • Other cleaning machines

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Sheet-type automatic cleaning device

Providing suitable custom equipment tailored to your needs! Design capable of process optimization.

This device is a single-wafer cleaning system compatible with SiC wafers of φ150mm (6") and φ200mm (8"). Wafers are loaded by the operator into a cassette containing 25 wafers on the LD side. After cleaning, the wafers are stored in a clean cassette set on the ULD side. The process is as follows: LD (underwater) → both-side brush scrubbing → both-side brush scrubbing → ultrasonic shower cleaning → spin drying → ULD (in air).

  • Company:PHT
  • Price:Other
  • Other cleaning machines

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